FIELD: physics.
SUBSTANCE: photoresist coating device has a protective housing with a cover, a substrate holder, nuts and a centrifuge shaft. The protective housing is mounted on the centrifuge shaft. The substrate holder is mounted on the centrifuge shaft and is fastened by nuts. The substrate holder has a base, a cover, stop pins and filling holes. On the inner surfaces of the base and the cover of the holder there are through grooves with a stepped side surface for fitting substrates. Stop pins are placed on the peripheral parts of the substrate holder. The cover of the holder has feed holes.
EFFECT: shorter manufacturing time and high output of non-defective items.
2 cl, 3 dwg
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