DEVICE TO TRANSFER SUBSTRATES WITHOUT FORMATION OF PARTICLES Russian patent published in 2014 - IPC H01L21/677 

FIELD: process engineering.

SUBSTANCE: proposed device can displace the substrate in several axes with the help of manipulator equipped with electromagnetic moving yoke at its end. Note here that said manipulator is arranged at rotary lifting assy. Said electromagnetic guide support is equipped with active moving element. The latter is fitted at stationary passive element with the help of magnetic supports arranged across magnetic supports. The latter retain active moving element at passive element at equilibrium and as-suspended. Sais active element is equipped with rotary lifting assy. The latter comprises external tube secured vertically at active element. Magnetic supports are arranged inside external tube at equal spacings on external tube outer surface for contactless direction of internal tube in vertically between two extreme positions.

EFFECT: transfer of substrates without friction and formation of particles.

21 cl, 14 dwg