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2 510 641

(13)

(51)

IPC

G02B5/22(2006-01-01)

(21) (22)

Application

2012115847/04, 2012-04-19

(24)

Start date

2012-04-19

(22)

Actual filing date

2012-04-19

(45)

Published

2014-04-10

(72)

Inventor

Sejsjan Ruben PavlovichZadiranov Jurij MikhajlovichIl'Inskaja Natalija Dmitrievna

(73)

Holder

Sejsjan Ruben Pavlovich

SPECTRAL CLEANING FILTER FOR EUV-NANOLITHOGRAPH AND METHOD OF ITS FABRICATION Russian patent published in 2014 - IPC G02B5/22

Abstract RU 2510641 C2

FIELD: process engineering.

SUBSTANCE: invention relates to spectral filter for EUV-nanolithograph with extreme ultraviolet radiation with 30-70% transmission over wavelength of 13.4 nm. Said filter is composed by sandwiched film applied on high-transparency support grate with cells made form nickel or gold. Said film comprises 30-50 pairs of Si and Mo or Zr or Nb plies, relatively transparent over 13.4 nm-wavelength, located in symmetry about horizontal plane dividing the filter into two equal halves over its cross-section. Said cells represent hexagons. Besides, this invention covers the method of filter production.

EFFECT: higher strength and transparency of support grate.

2 cl

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RU 2 510 641 C2

Authors

Sejsjan Ruben Pavlovich

Zadiranov Jurij Mikhajlovich

Il'Inskaja Natalija Dmitrievna

Dates

2014-04-10—Published

2012-04-19—Filed