FIELD: metallurgy.
SUBSTANCE: invention relates to a plant for vacuum deposition of a coating from a metal alloy onto a substrate (7). The generator - mixer of steam of the plant comprises a vacuum chamber (6), which has facilities for development of underpressure in it relative to environment and facilities providing for substrate (7) inlet and outlet. The chamber (6) is substantially impermeable for environment. An ejector head (3) for deposition of steam is designed to create a jet of steam of a metal alloy with sound speed in direction of the surface of the substrate (7) and perpendicularly to it. The ejector head (3) tightly communicates with a separate mixing device (14), which in its turn is connected upstream accordingly with at least two crucibles (11, 12), containing two different metals M1 and M2 in liquid form. Each crucible (11, 12) is connected by its own separate pipe (4, 4') with a mixer (14).
EFFECT: possibility is achieved for differentiated and quickly adjusted regulation of content of metals within an alloy, provides for even evaporation and high-quality coating.
18 cl, 6 dwg
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Authors
Dates
2014-05-20—Published
2009-12-17—Filed