UNIT FOR VACUUM DEPOSITION OF COATINGS AND METHOD FOR COATING A SUBSTRATE Russian patent published in 2022 - IPC C23C14/16 C23C14/24 C23C14/34 C23C14/56 

FIELD: coatings.

SUBSTANCE: invention relates to equipment for coating a substrate. Vacuum deposition unit for continuous deposition of coatings formed of metal or a metal alloy on a moving substrate comprises an evaporation crucible configured to supply metal or metal alloy vapours and containing an evaporating tube 7, a deposition chamber configured to pass the substrate along a predetermined trajectory, and a steam-jet coating apparatus 3 connecting the evaporating tube 7 with the deposition chamber, wherein the steam-jet coating apparatus 3 additionally includes a distribution chamber 31 containing at least one reheating means 33 located inside the distribution chamber and a steam relief nozzle 32 containing a lower hole 9 connecting the steam relief nozzle 32 with the distribution chamber 31, an upper hole 10 for output of steam into the deposition chamber, and two side surfaces 11, 12 converging in the direction of the upper hole 10.

EFFECT: uniform distribution of metal or metal alloy vapours with the condensation thereof in the distribution chamber prevented.

8 cl, 3 dwg