METHOD FOR PRODUCING AN AMORPHOUS NANOSTRUCTURED DIAMOND-LIKE COATING Russian patent published in 2021 - IPC C23C14/02 C23C14/06 C23C14/24 C01B32/26 B82B3/00 B82Y40/00 

FIELD: coatings.

SUBSTANCE: invention relates to the technology of applying hard wear-resistant nanostructured coatings from amorphous diamond-like carbon and can be used in metal working, mechanical engineering, medicine, electronics, solar power engineering, optoelectronics, photonics, in manufacture of liquid crystal displays, protective coatings with high hardness to increase the operational properties of the surface of products for various functional purposes. The method for producing an amorphous nanostructured diamond-like coating of a part 1 includes applying no less than one layer of a carbon diamond-like film by cathode sputtering of graphite, wherein an adhesive layer is preliminarily formed outside of the vacuum chamber by applying a powder of graphite, titanium, chromium, aluminium or a mixture thereof to the surface of the part and subjecting to the impact of an ultrasonic indenter 2 with the following mode:

wherein P is the force of pressing the indenter to the treated surface, N; S is the longitudinal supply of the indenter, mm/rev; n is the rotational speed of the part, rev/min; σ_t is the compressive yield strength of the material, MPa; d is the diameter of the part, mm; r is the radius of the indenter, mm; ν, μ_s , and μ_n are dimensionless coefficients dependent on the ratio between the sizes of d and r (at r = (0.4÷0.05)d with an error of less than 4% ν = 0.69, with an error of less than 8% μ_s = 1.29, μ_n = 12.36); m₁ and m₂ are the Poisson ratios of the materials of the part and the indenter, respectively; E₁ and E₂ are the elasticity moduli of the materials of the part and the indenter, respectively, MPa; f is the ultrasonic oscillation frequency of the indenter, Hz.

EFFECT: providing a possibility of applying an adhesive layer to a substrate by means of diffusion outside of the chamber and thereby reducing the time for application of an amorphous nanostructured diamond-like coating in a vacuum chamber, as well as increasing the adhesive strength of the coating.

1 cl, 2 dwg, 1 ex