NANOTECHNOLOGICAL COMPLEX BASED ON IONIC AND PROBE TECHNOLOGIES Russian patent published in 2014 - IPC H01L21/20 B82B3/00 

FIELD: nanotechnology.

SUBSTANCE: use: of new products nanoelectronics for a closed cycle of production. The essence of the invention consists in that in nanotechnology complex based on ion and probe technologies, comprising a distribution chamber with pumping means, in which there is a central robot-distributor with the ability of axial rotation, comprising a grip of substrate carriers, at that the distribution chamber comprises flanges by means of which it is connected to the loading chamber and the module of ion implantation, the grip of substrate carriers has the ability of interaction with the loading chamber and the module of ion implantation, the measuring module is integrated, comprising a scanning probe microscope and a module of ion beams with a system of gas injectors, and they are connected to the flanges of the distribution chamber and have an ability to interact with the grip of substrate carriers. The technical result: providing an ability to vary the technological routes and enhance the functional capabilities of the distribution chamber and have an ability to interact with the grip of substrate carriers.

EFFECT: implementation extends the functional capabilities of the nanotechnology complex.

5 cl, 1 dwg