FIELD: instrumentation.
SUBSTANCE: invention relates to optically active sensory technologies intended for detection of gas or fluid molecules, including those of toxic and explosive matters. Proposed method is implemented with the help of sensitive element based on slotted silicon microstructures with nano-structured porous ply of the surface of silicon walls. It consists in combination light dissipation in characteristic oscillatory modes of molecules amplified by partial light localisation in medium with periodically modulated reflective index (slotted silicon).
EFFECT: additional increase in probability of light interaction with molecules of detected gases or fluids results from availability of developed surface of porous ply which adds to sensitivity of gas sensor.
9 cl, 4 dwg, 1 tbl
| Title | Year | Author | Number |
|---|---|---|---|
| USE OF HYBRID SUBSTRATES OF SILICON NANOWIRES DECORATED WITH SILVER AND/OR GOLD NANOPARTICLES FOR RAPID DETECTION OF EXPLOSIVES | 2023 |
|
RU2821710C1 |
| CHEMORESISTIVE GAS SENSOR AND METHOD FOR ITS MANUFACTURE | 2023 |
|
RU2806670C1 |
| RECEPTION METHOD OF NANOSTRUCTURE SILICON BASE PLATES | 2007 |
|
RU2364983C1 |
| METHOD OF MAKING SILICON SENSITIVE ELEMENT FOR LUMINESCENT OXYGEN NANOSENSOR | 2013 |
|
RU2539120C1 |
| COMPOSITION FOR SELECTIVE ETCH FOR CHEMICAL PROCESS OF THINNING OF SILICON PLATES | 2015 |
|
RU2615596C2 |
| METHOD FOR PREPARING WATER SUSPENSION OF BIOCOMPATIBLE POROUS SILICON PARTICLE | 2012 |
|
RU2504403C1 |
| METHOD OF PRODUCING POROUS CERAMIC BIOCOMPATIBLE NANOCARRIERS | 2014 |
|
RU2553913C1 |
| THREE-DIMENSIONALLY STRUCTURED SEMICONDUCTOR SUBSTRATE FOR FIELD-EMISSION CATHODE, METHOD FOR ITS OBTAINING, AND FIELD-EMISSION CATHODE | 2012 |
|
RU2524353C2 |
| METHOD FOR OBTAINING A FUNCTIONALIZED NANOSTRUCTURE BASED ON POROUS SILICON | 2022 |
|
RU2796247C1 |
| METHOD OF SYNTHESIS OF GRAPHENE-LIKE LAYERS IN POROUS SILICON STRUCTURES | 2018 |
|
RU2731278C2 |
