FIELD: chemistry.
SUBSTANCE: method includes the following steps: obtaining pores under the effect of electrolysis in a plate with thickness of 700-730 mcm and area of up to 32 cm2 of monocrystalline silicon, which is the anode, with p-type conductivity, doped with boron with concentration of about 10-19 cm-3, with resistivity of 3-7·10-3 ohm·cm, the surfaces of which are directed in parallel to the crystallographic planes in a glass-carbon cup, which is the cathode; wherein the electrolyte used is a solution consisting of different volume parts of hydrofluoric acid and ethyl alcohol; subsequent separation of the obtained porous layers from the remaining part of the bulk crystal by increasing the applied voltage by 5-90%, which changes the mechanism of the electrochemical process and switches from pore-formation to continuous polishing etching; washing the separated layers in ethanol and drying in air, followed by stepwise thermal annealing and grinding to fine powder state. Annealing is carried out first for 2 hours at 250°C and then for 20 minutes at 650°C in a hydrogen atmosphere.
EFFECT: obtaining silicon biocompatible nanocarriers with porosity of 40-80% and size of end-to-end pores of 5-20 nm.
3 cl, 7 dwg
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Authors
Dates
2015-06-20—Published
2014-07-22—Filed