PRODUCTION OF METAL OXIDE LAYERS BY ELECTRIC ARC EVAPORATION Russian patent published in 2014 - IPC C23C14/08 C23C14/32 

FIELD: process engineering.

SUBSTANCE: invention relates to production of oxide plies by deposition from vapour phase (PVD), primarily, by electric arc evaporation. It can be used for protection of parts against wear, at production of barrier layers, ferroelectrics, superconductors or fuel cells. Powder-metallurgical target consisting of at least two metallic and/or semimetal elements is evaporated. Composition of said metallic and/or semimetal elements or target is selected so that during heating at transition from the room temperature to liquid phase interface of purely solid phases of appropriate phase diagram of fused mix of said elements is not crossed.

EFFECT: deposition of preset crystalline structure plies, ruled out formation of oxide islands and integration of metal sprays in ply.

19 cl, 14 dwg