FIELD: metallurgy.
SUBSTANCE: invention relates to production of oxide layers stable at high temperatures. Proposed method is implemented by evaporation of target from the alloy of metal and/or semimetal components by electric arc with formation of oxide including three or more components. Note here that oxide formation temperature is adjusted by selection of target alloy composition containing two or more components on the basis of phase curve of dual system or system with great number of components. Said system describes transition from absolutely liquid phase to phase with solid components at the temperature of oxide formation.
EFFECT: higher quality of evaporated layers.
16 cl, 6 dwg
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