FIELD: metallurgy.
SUBSTANCE: target for application of metal oxide and/or metal nitride coating comprises metal matrix accommodating nonconducting metal oxide and/or nitride. Metal matrix is made of oxide and/or nitride metal and structured to bonding grid of grooves filled with said metal. Grid spacing are filled with metal oxide and/or nitride. Proposed method comprises holographic structuring of metal matrix from aluminium and aluminium oxide to produce metal matrix of bonding grid of grooves filled with aluminium, grid spacings being filled with aluminium oxide.
EFFECT: application of nonconducting layer on substrate by spark deposition.
7 cl, 2 dwg
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Authors
Dates
2013-12-20—Published
2009-08-10—Filed