APPLICATION OF TARGET FOR SPARK DEPOSITION AND METHOD OF MAKING SUCH TARGET Russian patent published in 2013 - IPC C23C14/32 

Abstract RU 2501885 C2

FIELD: metallurgy.

SUBSTANCE: target for application of metal oxide and/or metal nitride coating comprises metal matrix accommodating nonconducting metal oxide and/or nitride. Metal matrix is made of oxide and/or nitride metal and structured to bonding grid of grooves filled with said metal. Grid spacing are filled with metal oxide and/or nitride. Proposed method comprises holographic structuring of metal matrix from aluminium and aluminium oxide to produce metal matrix of bonding grid of grooves filled with aluminium, grid spacings being filled with aluminium oxide.

EFFECT: application of nonconducting layer on substrate by spark deposition.

7 cl, 2 dwg

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RU 2 501 885 C2

Authors

Kurapov Denis

Lekhtkhaler Markus

Dates

2013-12-20Published

2009-08-10Filed