FIELD: process engineering.
SUBSTANCE: invention relates to vacuum processing of biller surfaces. Coating application on metal billets is implemented at vacuumising plant and comprises target composed by first electrode that makes the part of the source of evaporation by arc and through which arc is fed with arc discharge current for target material evaporation and second electrode composed of billet holder to make with said billets the displacement electrode. Billet is pretreated by bombardment of its surface with metal ions to be injected in substrate surface without metal removes therefrom and ply growth. Note here that ions of metal are injected into substrate surface which make the component of said ply. Direct application of ply is executed on pretreated surface.
EFFECT: eliminated defects produced at substrate surface processing.
17 cl, 10 dwg
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Authors
Dates
2015-03-10—Published
2012-04-05—Filed