SENSITIVE ELEMENT OF MICROMECHANICAL COMPENSATION ACCELEROMETER Russian patent published in 2013 - IPC G01P15/13 

FIELD: measurement equipment.

SUBSTANCE: sensitive element comprises an inertia mass, elastic elements, a feedback coil, conducting paths for electric connection of feedback coils with a control circuit, glass plates, an outer frame, with sites arranged on it for fixation to glass plates. Elastic elements are arranged along the axis of symmetry of the inertia mass. One end of which is fixed with the outer frame, the other one with the inertia mass. On one side of the inertia mass there is a feedback coil, the other side of the inertia mass is a plate of a capacitance angle sensor. A magnetic conductor with permanent magnets and feedback coils form a magnetic system of an accelerometer. Connection of feedback coils with the control circuit is performed by conducting paths arranged above the elastic elements. Along the axis of symmetry of the inertia mass and the axis of twisting oscillations of elastic elements.

EFFECT: invention makes it possible to increase accuracy of measurements.

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