MICROMECHANICAL ACCELEROMETER Russian patent published in 2014 - IPC G01P15/00 

Abstract RU 2515378 C1

FIELD: measurement equipment.

SUBSTANCE: micromechanical accelerometer comprises a sensitive element, made of single-crystal silicon of low conductivity, an external frame with a pendulum fixed on it with the help of resilient torsions. The external frame has alternating width. In its narrow part there are U-shaped loops facing outside. The sites of fixation to glass pads on the external frame are arranged strictly on longitudinal and transverse axes of a sensitive element. In the micromechanical accelerometer there are round glass pads. This simplifies assembly and reduces labour intensiveness of the item.

EFFECT: increased accuracy with simultaneous reduction of labour intensiveness without change in mass and dimension parameters.

2 dwg

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RU 2 515 378 C1

Authors

Chaplygin Jurij Aleksandrovich

Timoshenkov Sergej Petrovich

Shilov Valerij Fedorovich

Mironov Sergej Gennad'Evich

Kirgizov Sergej Viktorovich

Glazkov Oleg Nikolaevich

Anchutin Stepan Aleksandrovich

Kochurina Elena Sergeevna

Timoshenkov Aleksej Sergeevich

Dates

2014-05-10Published

2012-11-20Filed