FIELD: measurement equipment.
SUBSTANCE: micromechanical accelerometer comprises a sensitive element, made of single-crystal silicon of low conductivity, an external frame with a pendulum fixed on it with the help of resilient torsions. The external frame has alternating width. In its narrow part there are U-shaped loops facing outside. The sites of fixation to glass pads on the external frame are arranged strictly on longitudinal and transverse axes of a sensitive element. In the micromechanical accelerometer there are round glass pads. This simplifies assembly and reduces labour intensiveness of the item.
EFFECT: increased accuracy with simultaneous reduction of labour intensiveness without change in mass and dimension parameters.
2 dwg
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|---|---|---|---|
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| MICROMECHANICAL ACCELEROMETER | 2020 | 
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| MICROMECHANICAL ACCELEROMETER SENSOR ELEMENT | 2020 | 
 | RU2748290C1 | 
| SOLID STATE LINEAR ACCELERATION SENSOR | 2020 | 
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| SENSITIVE ELEMENT OF INTEGRAL ACCELEROMETRE | 2008 | 
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 | RU2525715C1 | 
Authors
Dates
2014-05-10—Published
2012-11-20—Filed