METHOD OF ELECTROCHEMICAL X-RAY CONTACTLESS LITHOGRAPHY Russian patent published in 2014 - IPC G03F7/00 

Abstract RU 2529592 C2

FIELD: nanotechnology.

SUBSTANCE: invention relates to the field of nanotechnology, describes a method of electrochemical surface structuring of materials and can be used in manufacture of microelectronic elements, single-layer and multilayer printed boards, optical elements, and other thin film structures. The essence of the invention consists in carrying out galvanic treatment of material while simultaneous irradiation of the surface of the working electrode by X radiation.

EFFECT: possibility of local (with the accuracy to 10 nm) acceleration/deceleration of the processes occurring at the interface of electrode/electrolyte.

9 cl, 5 dwg

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Authors

Napol'Skij Kirill Sergeevich

Eliseev Andrej Anatol'Evich

Sapoletova Nina Aleksandrovna

Petukhov Dmitrij Igorevich

Snigirev Anatolij Aleksandrovich

Snigireva Iraida Ivanovna

Dates

2014-09-27Published

2012-11-19Filed