FIELD: physics.
SUBSTANCE: production of an X-ray lithographic template involves processes of forming a resistive mask on the working surface of the starting electroconductive substrate (or having electroconductive layers), processes for electrodeposition of a metallic X-ray absorbing layer, wherein the starting substrate consists of two components made from different materials: a reference ring and an internal disc which is completely removed by selective etching on the last stages of making the template.
EFFECT: high contrast and radiotransparency of the X-ray lithographic template.
3 cl, 3 dwg
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