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2 431 882

(13)

(51)

IPC

G03G15/54(2006-01-01)

(21) (22)

Application

2010113902/28, 2010-04-08

(24)

Start date

2010-04-08

(22)

Actual filing date

2010-04-08

(45)

Published

2011-10-20

(72)

Inventor

Gentselev Aleksandr NikolaevichZelinskij Aleksandr GeorgievichKondrat'Ev Vladimir Ivanovich

(73)

Holder

Uchrezhdenie Rossijskoj Akademii Nauk Institut Jadernoj Fiziki Im. G.I. Budkera Sibirskogo Otdelenija Ran So Ran)

METHOD OF MAKING LIGA TEMPLATE Russian patent published in 2011 - IPC G03G15/54

Abstract RU 2431882 C1

FIELD: physics.

SUBSTANCE: initial substrate is made form beryllium foil. A buffer (protective) layer of exposed or hardened negative photoresist SU-8 is formed on the working surface of the substrate.

EFFECT: high level of contrast and radiotransparency.

3 dwg

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RU 2 431 882 C1

Authors

Gentselev Aleksandr Nikolaevich

Zelinskij Aleksandr Georgievich

Kondrat'Ev Vladimir Ivanovich

Dates

2011-10-20—Published

2010-04-08—Filed