FIELD: technological processes.
SUBSTANCE: invention relates to a device for the synthesis of coatings on articles. Device comprises a working vacuum chamber, a crucible placed on the bottom of the chamber with an ingot of ingoing metal inside it, a substrate holder, bias supply and a discharge power source. Bias supply is connected by a negative pole to the substrate holder, and the discharge power source is connected by a negative pole to the camera. Inside the chamber there is an electrode isolated from it, which is connected to the positive pole of the bias supply. Crucible is isolated from the chamber and connected to the positive pole of the discharge power source.
EFFECT: improving the quality of the synthesized coating.
1 cl, 1 dwg
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