METHOD OF OBTAINING MATERIAL FOR HIGH TEMPERATURE MASS-SENSITIVE PIEZORESONANCE SENSOR BASED ON MONOCRYSTAL OF LANTHANUM-GALLIUM ALLUMINIUM TANTALATE Russian patent published in 2014 - IPC C30B15/02 C30B33/02 C30B29/30 H01L41/18 H01L41/22 

FIELD: chemistry.

SUBSTANCE: method of obtaining a material for a high temperature mass-sensitive piezoresonance sensor based on a monocrystal of lanthanum-gallium aluminium tantalate, the composition of which corresponds to formula La₃Ta_0.5Ga_5.5-xAl_xO₁₄, where x=0.1-0.3, characterised by the electric resistance not less than 10⁹ Ohm at a temperature of 20-600°C, includes growing of monocrystals from a melt of oxides its component constituents in an atmosphere of an oxidiser-containing inert gas, and additional annealing in air at a temperature of 1050-1150°C for 41-43 hours.

EFFECT: increase of exploitation properties, such as the electric resistance of the material itself, increased by more than an order, and extension of the work temperature range to room temperature.

4 cl, 2 dwg, 5 tbl