METHOD OF OBTAINING ANTIMONIDE GALLIUM WITH A LARGE SPECIFIC ELECTRICAL RESISTANCE Russian patent published in 2017 - IPC H01L21/205 

Abstract RU 2623832 C1

FIELD: electricity.

SUBSTANCE: in the method of manufacturing gallium antimonide with a large specific electrical resistance including growing gallium antimonide by epitaxy on a substrate of gallium antimonide, the process of growing gallium antimonide is carried out by gas phase epitaxy from organometallic compounds at a temperature in the range from 550 to 620°C, when the content of antimony atoms is exceeded in relation to the content of gallium atoms in the gas phase, 20-50 times.

EFFECT: creation of a method for the industrial manufacture of GaSb with a large specific electrical resistance.

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RU 2 623 832 C1

Authors

Levin Roman Viktorovich

Mizerov Mikhail Nikolaevich

Pushnyj Boris Vasilevich

Dates

2017-06-29Published

2016-04-27Filed