SENSITIVE ELEMENT OF SURFACE ACOUSTIC WAVES FOR TEMPERATURE MEASUREMENT Russian patent published in 2015 - IPC G01K11/22 H01L41/08 

FIELD: measurement technology.

SUBSTANCE: invention refers to measurement equipment and can be applied in temperature measurement. Invention claims a sensitive element of surface acoustic waves for temperature measurement, consisting of alpha quartz plate with at least one interdigital transducer (IDT) and at least two reflecting elements (RE) formed on its surface. Work surface of the plate is associated rigidly with the right Cartesian coordinate system (X1, Y1, Z1) where Z1 axis is perpendicular to the plate surface. Right Cartesian coordinate system (X1, Y1, Z1) is oriented at an angle against crystallographic coordinate system of quartz (X, Y, Z) determined by Euler angles φ, θ, Ψ, so that angle φ value lies within one of the ranges of -20°+60°·n to 20°+60°·n, where n is 0, 1, 2, 3, 4, 5, angle θ value lies within 140° to 180° range or -40° to 0 range, angle Ψ value is ±90°. IDT and RE electrodes deviate from Y1 axis by an angle not exceeding 20° modulus.

EFFECT: enhanced precision of temperature measurement.

16 cl, 4 dwg