FIELD: physics.
SUBSTANCE: invention can be used to produce high-quality semiconductor light-emitting diodes (LED) based on heterostructures of A3B5 compounds. The method includes irradiating a plate with heterostructures with integral electron flux with density of 1014-1017 el/cm2 and energy of 0.3-10 MeV at a temperature not higher than minus 70°C, followed by rapid thermal annealing at a temperature higher than 600°C with photon flux in the visible spectrum with radiation intensity of 1-10 W/cm and energy higher than the band-gap of the semiconductor layer of the heterojunction the narrowest band-gap.
EFFECT: high injection capacity and external quantum efficiency of heterostructures of light-emitting diodes.
1 dwg
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Authors
Dates
2015-02-10—Published
2013-09-26—Filed