FIELD: printing.
SUBSTANCE: invention relates to the field of lithography and relates to methods of manufacturing of cylindrical photomask provided with nano-pattern. The method comprises applying a layer of elastomeric material on the transparent cylinder with the subsequent formation on the elastomeric material of the pattern elements ranging in size from 1 nm to 100 mcm. Formation of the pattern elements is carried out by transferring the pattern elements with preliminary fabricated template, or using a process of direct formation of the pattern on the elastomeric material. Embodiments of the method comprise formation of the pattern with the elements in size from 1 nm to 100 microns on the elastomeric material, followed by lamination of the elastomeric material provided with nano-pattern on the surface of the cylinder.
EFFECT: providing the ability of manufacturing the nanoscale elements using the method of near-field lithography.
25 cl, 20 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD AND DEVICE FOR APPLICATION OF NANO-PATTERN ON LARGE AREA | 2008 |
|
RU2488188C2 |
| STENCIL FOR X-RAY LITHOGRAPHY AND METHOD OF MANUFACTURING SAME | 0 |
|
SU824345A1 |
| METHOD FOR MANUFACTURING MICROCIRCUITS | 2023 |
|
RU2809344C1 |
| METHOD OF FORMING CHANNEL FOR TRANSMITTING OPTICAL SIGNAL BETWEEN ELECTRONIC MODULES ON ONE PRINTED-CIRCUIT BOARD | 2013 |
|
RU2536790C2 |
| NANO-IMPRINTED SUBSTRATE | 2017 |
|
RU2748273C2 |
| METHOD FOR PROCESSING INCONSISTENCIES IN SOLAR CELL-BASED DEVICES AND DEVICES OBTAINED USING IT | 2018 |
|
RU2762129C2 |
| METHOD OF MAKING DIE WITH PATTERN, DIE WITH PATTERN AND METHOD FOR PRINTING | 2015 |
|
RU2695290C2 |
| FLEXIBLE NANO-IMPRINTING STAMP | 2005 |
|
RU2365960C2 |
| METHOD OF PRODUCING FREE MASK FOR ELECTRONIC AND ION-RAY PROJECTION SYSTEMS | 0 |
|
SU1352445A1 |
| METHOD OF MANUFACTURE OF TEMPLATE | 0 |
|
SU1788532A1 |
