METHOD FOR MANUFACTURING MICROCIRCUITS Russian patent published in 2023 - IPC H01L21/02 H01L21/22 

FIELD: manufacture of microcircuits.

SUBSTANCE: in the method for manufacturing microcircuits, when transferring the image of the microcircuit onto a substrate, a layer of adhesive material is applied to a photoresist plate, separately from the substrate. The photoresist plate is installed in such a way that on one side there is a chamber for magnetic nanoparticles with inlet and outlet devices, and on the other side there is an inductor, with a relief pattern of microcircuit elements made on its surface, and connected to the pole of the electromagnet core. The inlet device is opened, the chamber is filled with magnetic nanoparticles coming from the installation for the synthesis of magnetic nanoparticles, the inlet device is closed. The outlet device is opened, a direct electric current is passed through the electromagnet winding, under the influence of the working magnetic flux of the inductor, magnetic nanoparticles begin to accelerate in the direction of the inductor protrusions and settle as a layer on the surface of the photoresist plate, forming insoluble areas of the pattern of the microcircuit elements, the outlet device is closed. The photoresist plate is connected to the substrate, developed, etched, the photoresist is removed, and electronic circuit elements are formed on the substrate.

EFFECT: simplification of microcircuit manufacturing technology.

1 cl, 6 dwg