METHOD OF MAKING MICROCIRCUITS Russian patent published in 2025 - IPC H01L21/02 

FIELD: electricity.

SUBSTANCE: invention can be used for making microcircuits. Substance of the invention consists in the fact that the microcircuit manufacturing method includes the electronic circuit image transfer to the coated substrate, followed by the coating etching and formation of the electronic circuit elements on the substrate, at that, when transferring the microcircuit image to the substrate, a layer of ferromagnetic liquid is applied on the photoresist plate separately from the substrate, the photoresist plate is installed in the process unit so that a thermal radiation source is located above the photoresist plate, and under the photoresist plate there is an inductor with a microcircuit elements relief pattern made on its surface, connected to the pole of the electromagnet core, direct electric current is passed through the electromagnet winding, under the action of the working magnetic flux of the inductor, the ferromagnetic nanoparticles move in the direction of the inductor projections, forming insoluble sections of the pattern of the microcircuit elements on the surface of the photoresist plate, chemical compounds are introduced, which cause decomposition of a surfactant, as a result of which ferromagnetic nanoparticles stick together, are washed, are heated by thermal radiation in such a way that ferromagnetic nanoparticles are fused into the surface of the photoresist plate, the photoresist plate is connected to the oxidised surface of the substrate, developed, method includes etching open areas, as a result of which the surface of the substrate is exposed, forming a relief arrangement of insulating transitions, removing the photoresist covered with a layer of ferromagnetic nanoparticles, as a result of which windows are formed on the substrate, active, passive elements of the electronic circuit and current-conducting films are formed on isolated sections of the substrate.

EFFECT: simplifying the technology of making microcircuits.

1 cl, 5 dwg