MICRO-OPTO-ELECTROMECHANICAL SENSOR OF ANGULAR SPEED Russian patent published in 2015 - IPC G01P3/36 

FIELD: measurement equipment.

SUBSTANCE: invention relates to the field of instrument making and relates to an angular speed sensor. The sensor comprises a fibre-optic coupler, connected by light guides with a source and a receiver of optical radiation. The radiation receiver is connected to a unit of information processing and a sensitive element. The sensitive element includes a centrally fixed beam and four devices of optical radiation orientation, symmetrically arranged opposite to two opposite horizontal planes of the beam. The beam is made of piezomaterial with a light absorbing coating applied opposite to horizontal planes of optical radiation orientation devices. The orientation devices are made of quartz sand and are partially coated with mirror sputtering. Mirror sputtering is not available on areas corresponding to rectangular projection of the beam to surfaces of orientation devices.

EFFECT: expansion of functional capabilities of a sensor.

2 dwg