ANGULAR VELOCITY AND LINEAR ACCELERATION MICRO-OPTO-ELECTROMECHANICAL THREE-AXIS SENSOR Russian patent published in 2017 - IPC G01P3/36 

FIELD: instrument making.

SUBSTANCE: invention relates to instrument making field, in particular, to angular velocity and linear acceleration measuring devices. Summary of invention is, that angular velocity and linear acceleration micro-opto-electromechanical three-axis sensor optical radiation absorption device consists of four beams intersecting at right angle with square lateral side, cantilever fitted with small faces to central gasket in intersection area, each beam is made from piezoelectric material with light-absorbing coating, includes electric contacts, located at beam both ends, and load secured on its free end, sensitive element comprises fourteen additional optic radiation orientation devices, wherein each of sixteen optic radiation orientation devices is located symmetrically relative to intersected beams geometric center, parallel to four beams free ends long faces, attached by one smaller side face to central gasket, and by other small side face rests on side gasket, providing gap between four optic radiation orientation devices and optical radiation absorption device cantilever fixed beam, angular velocity and linear acceleration micro-opto-electromechanical three-axis sensor additionally comprises fourteen channels for optical radiation receiving-transmitting, each of which is optically connected, through light guide, with one of fourteen additional optic radiation orientation devices and electrically connected to information processing unit, control device, connected to information processing unit and intersected bars electric contacts.

EFFECT: technical result is expansion fibre-optic linear acceleration converter functional capabilities based on optical tunnelling effect to provide angular velocity and linear acceleration measurement relative to inertial coordinate system three axes.

1 cl, 5 dwg