PROCEDURE FOR APPLICATION OF COATING ON ITEMS OUT OF CERAMICS IN VACUUM Russian patent published in 2010 - IPC C23C14/18 C23C14/02 C23C14/24 

FIELD: metallurgy.

SUBSTANCE: procedure consists in placement of items in working chamber, in its vacuumising, in preliminary plasma treatment of items by means of items ion cleaning with argon, in effecting items with plasma of gas containing oxidant and in sputtering cathode out of metal. Preliminary items are subjected to plasma treatment during 1-14 minutes, also, when an item is treated with plasma of gas containing oxidant, there is formed a mono-molecular layer of a chemical compound out of elements of base material and active elements of gas plasma on surface of the item. Upon preliminary plasma treatment in the working chamber there is created vacuum to residual pressure 10^-3 Pa; for sputtering there is used a cathode made out of metal with specific resistance as high as 16 mcOhmxcm.

EFFECT: uniform by thickness metal coating, increased adhesion of coating on surface of item.

6 cl, 2 ex