FIELD: medicine.
SUBSTANCE: coating contains layers of at least one metal oxide specified in titanium oxide, zirconium oxide, hafnium oxide, tantalum oxide, niobium oxide. The method involves applying a multiple-layer or multicomponent coating by low-pressure atomic layer deposition at a temperature of 200-300°C, blowing a reaction zone with nitrogen and with the use of precursors containing organometallic compounds of the above metals and water. The precursors are applied on the surface by the pulsed delivery to the surface of a titanium substrate at a supply pulse length of 0.2-0.6 s and the intermediate blowing of the reaction zone with nitrogen for 6 s. A deposition cycle number makes 100-1000 cycles.
EFFECT: method provides coating homogeneity, good bioactive properties, low toxicity and corrosive resistance.
6 ex, 5 tbl, 7 dwg
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Authors
Dates
2015-06-27—Published
2014-04-16—Filed