METHOD OF SYNTHESIS OF POLYCRYSTALLINE COATINGS BASED ON TITANIUM DIOXIDE BY ATOMIC LAYER DEPOSITION Russian patent published in 2025 - IPC C23C16/40 C23C16/455 A61L27/30 

FIELD: chemistry.

SUBSTANCE: invention relates to a method for synthesis of titanium dioxide-based coatings on implant surfaces. Four-step cyclic process is carried out by atomic layer deposition in the mode of self-limited growth of titanium dioxide layers at temperature of 215±15 °C in nitrogen flow by cyclic successive alternation of four stages. At the first stage with duration of 0.05 to 0.5 s, TiCl₄ vapour is pulsed into the synthesis zone and pressure in the reactor is increased from 0.1-1.5 mbar to 4-5 mbar. At the second stage, pressure in the reactor is reduced to 0.1-1.5 mbar and nitrogen is purged for at least 1 and not more than 20 s. At the third stage with duration of not less than 10 s, but not more than 20 s, an oxygen-containing source is introduced into the reactor, which is oxygen plasma at the rate of oxygen supply to reactor of 150 cm³/min, or water vapour. Pressure in the reactor is maintained at not more than 1.5 mbar. At the fourth stage with duration of 1 to 20 s, the reactor is purged with nitrogen. Cyclic process involving the said four stages makes 10 to 2,000 cycles.

EFFECT: disclosed is a method of synthesis of polycrystalline coatings based on titanium dioxide by atomic layer deposition.

1 cl, 7 dwg, 6 ex