MULTIFUNCTIONAL MICROWAVE MONOLITHIC INTEGRATED CIRCUIT BOARD BASED ON MULTILAYER SEMICONDUCTOR STRUCTURE Russian patent published in 2015 - IPC H01L27/04 

FIELD: electricity.

SUBSTANCE: multifunctional microwave monolithic integrated circuit board based on a multilayer semiconductor structure combines functions of several monolithic integrated circuit boards and comprises field-effect Schottky transistors and quasivertical Schottky barrier diodes with high values of boundary frequencies, which are integrated at the same chip and used as active and non-linear elements. Active areas of the field-effect transistors and basic areas of the quasivertical diodes are placed in different epitaxial layers with a low-ohmic contact layer placed between them and ohmic source and drain contacts of the transistors and ohmic cathodic contacts of the diodes are attached to it.

EFFECT: increased degree of integration for the microwave multifunctional integrated circuit board, reduced weight and dimensions for receiving and transmitting modules of antenna arrays, reduced losses related to signals passage between the schemes of functional units, increased boundary frequencies for the Schottky barrier diodes.

1 dwg