TARGET OF TITANIUM BORIDE Russian patent published in 2015 - IPC C23C14/34 C23C14/06 C22C29/14 

FIELD: metallurgy.

SUBSTANCE: invention relates to metallurgy, particularly, to target from titanium boride and can be used for production of coatings. Titanium boride target for deposition from vapour phase contains carbon and particles of one or more metals of the group including iron, nickel, cobalt and chromium. Mean grain size of TiB₂ makes 1 to 20 mcm while carbon content varies from 0.1 to 5 wt %. Total content of Fe, Ni, Co and Cr makes 500-3000 mcg/g. Target porosity makes less than 5 vol %. Carbon is distributed as separate particles over boundaries of TiB₂ grins so that mean spacing between carbon separate particles makes less than 20 mcm.

EFFECT: higher resistance to heat shock.

6 cl, 1 dwg, 3 ex