FIELD: measurement equipment.
SUBSTANCE: substance of the invention consists in segmentation of magnetic contrast of microobjects by exclusion of contribution from topographic contrast from a full REM-image in secondary electrons. When realising the method in the specified plane of interest, near the tested object they arrange a mirror-like smooth (no-relief) thin-sheet indicator plate from current-conducting non-magnetic material having electric contact with the body of the raster electronic microscope (REM), and by its REM-image they decided about spatial distribution of the source field.
EFFECT: expansion of possibilities of raster electronic microscopy - visualisation of static spatial microdistributions of a magnetic field created near surface of magnetic materials with domain structure, miniature permanent magnets and magnetic elements of microelectromechanical systems.
2 dwg
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