METHOD OF FORMING OBJECT SURFACE TOPOGRAPHY IMAGE Russian patent published in 2011 - IPC G01N23/22 

FIELD: physics.

SUBSTANCE: scanning tunneling microscopy probe is placed at minimum distance from the surface of the analysed object, which enables to detect current of secondary electrons in a scanning electron microscope (SEM). Detection is carried out synchronously with the scanning mode of the SEM. The method enables formation of the image of the topography of the surface of the object, which is incompatible with a high vacuum, by creating an ultra-low vacuum in the zone of interaction of the electron beam of the SEM with the surface of the object by injecting inert gas or water vapour into that zone.

EFFECT: low statistical error in measuring total electric charge of secondary electrons in a gas medium.

4 cl, 4 dwg