METHOD TO MEASURE THERMAL RESISTANCE OF NANOELECTRONICS COMPONENTS USING WIDTH-PULSE MODULATION OF HEATING POWER Russian patent published in 2015 - IPC G01R31/26 

FIELD: measurement equipment.

SUBSTANCE: method consists in passage of a sequence of heating current pulses via a measurement object with constant period of repetition and duration, which varies according to harmonic law, measurement in pauses of temperature sensitive parameter - voltage at the object as measurement current through it and determination of object temperature variation caused by modulation of heating capacity. Further with the help of Fourier transform they calculate the amplitude of the first harmonics of object temperature, afterwards they determine thermal resistance as ratio of amplitudes of the first harmonics of temperature and heating power. At the same time during determination of amplitude of the first harmonics of heating power they take into account the value of scattered capacity in the pause between the heating pulses during of passage of measurement current through the object.

EFFECT: increased accuracy.

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