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2 659 702

(13)

(51)

IPC

G02B5/18(2006-01-01)

C23C14/48(2006-01-01)

(21) (22)

Application

2016122159, 2016-06-03

(24)

Start date

2016-06-03

(22)

Actual filing date

2016-06-03

(45)

Published

2018-07-03

(72)

Inventor

Stepanov Andrej LvovichNuzhdin Vladimir IvanovichValeev Valerij FerdinandovichGalyautdinov Mansur FalyakhutdinovichKurbatova Nadezhda VasilevnaVorobev Vyacheslav ValerevichOsin Yurij Nikolaevich

(73)

Holder

Federalnoe Gosudarstvennoe Byudzhetnoe Uchrezhdenie Nauki Issledovatelskij Tsentr Nauchnyj Tsentr Rossijskoj Akademii Nauk"

METHOD OF MANUFACTURING DIAMOND DIFFRACTION LATTICE Russian patent published in 2018 - IPC G02B5/18 C23C14/48

Abstract RU 2659702 C2

FIELD: chemistry.

SUBSTANCE: method includes forming a given periodic microstructures on the surface of polished diamond by using boron ion implantation with the energy of 10-100 keV, a dose of 1⋅10¹⁵-1.0⋅10²⁰ion/cm² through the surface mask.

EFFECT: providing the possibility of manufacturing diamond diffraction gratings by continuous implantation with boron ions.

10 dwg

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RU 2 659 702 C2

Authors

Stepanov Andrej Lvovich

Nuzhdin Vladimir Ivanovich

Valeev Valerij Ferdinandovich

Galyautdinov Mansur Falyakhutdinovich

Kurbatova Nadezhda Vasilevna

Vorobev Vyacheslav Valerevich

Osin Yurij Nikolaevich

Dates

2018-07-03—Published

2016-06-03—Filed