FIELD: process engineering.
SUBSTANCE: invention relates to application of coatings on probes for nuclear power microscopy (NPM). This process includes application of coating on at least one NPM-probe with the help of ion cluster source. Coating is composed of material consisting of spherical nanoparticles of controlled size.
EFFECT: perfected geometry, decreased initial radius of probe tip curvature.
10 cl, 4 dwg
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