NETWORK MICRO- AND NANOSTRUCTURE, IN PARTICULAR FOR OPTICALLY TRANSPARENT CONDUCTIVE COATINGS, AND METHOD FOR OBTAINING THEREOF Russian patent published in 2016 - IPC B82B1/00 H01L21/31 H01L21/32 C01B31/02 B82Y40/00 

Abstract RU 2574249 C2

FIELD: chemistry.

SUBSTANCE: invention relates to chemical industry, microelectronics and nanotechnology and can be applied in production of transparent conductive coatings, light-absorbing and light-transforming layers for optical and photovoltaic devices, self-cleaning surfaces, biometric materials, membranes, catalysts. Network micro- and nanostructure is obtained by formation on the substrate of substance layer, which forms cracks in the process of chemical and/or physical reaction, and application of obtained layer as template for setting geometry of micro- and nano-structure. Obtained network micro- and nanostructure contains conductive or dielectric layer, made in form of single open-work structure, corresponding to geometry of cracks.

EFFECT: invention makes it possible not to apply complicated methods of lithography, increase mechanical reliability of structure and its electric conductivity.

16 cl, 2 dwg

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RU 2 574 249 C2

Authors

Khartov Stanislav Viktorovich

Simunin Mikhail Maksimovich

Voronin Anton Sergeevich

Karpova Darina Valer'Evna

Shiverskij Aleksej Valer'Evich

Fadeev Jurij Vladimirovich

Dates

2016-02-10Published

2013-09-09Filed