METHOD FOR MANUFACTURING OF A SENSOR MODULE BASED ON THE EFFECT OF GIANT RAMAN SCATTERING, FOR MICROFLUID DEVICES (VERSIONS) Russian patent published in 2019 - IPC C03C21/00 C03C15/00 B82Y40/00 

FIELD: manufacturing technology.

SUBSTANCE: invention relates to methods of producing a sensor module for obtaining giant Raman scattering (GRS) spectra. Method involves four-step treatment of the surface of a flat glass base. At the first stage enrichment of near-surface layer of glass base with ions of metal – silver, gold, copper or any combination thereof in any proportions. At the second stage, the glass surface is brought into contact with the template with the specified micro profile, which is the anode on one side and with the flat cathode, which is the substrate holder, on the other side, placed in chamber furnace, in which glass is heated to temperature in range from 50 °C to temperature lower by 20 ... 30 °C than transition temperature of glass, simultaneously with heating glass to anode is applied constant voltage. Then the glass sample is inertially cooled in the chamber furnace and electric voltage is removed. At the third step, the modified glass base is selectively etched in the liquid etching agent. At the fourth step, a glass base with a formed system of microchannels is subjected to high-temperature annealing in a reducing atmosphere.

EFFECT: design of a method of producing a sensor module for recording high-resolution HRS spectrum from substances characterized by high and low GRS activity, as well as enabling integration of the sensor module into microfluidics devices.

9 cl, 9 dwg