METHOD OF PRODUCING NANOLITHOGRAPHIC DRAWINGS WITH A CRYSTALLINE STRUCTURE WITH A SUPER-DEVELOPED SURFACE Russian patent published in 2018 - IPC B82B1/00 

FIELD: technological processes.

SUBSTANCE: usage for nanolithographic drawings with a crystal structure with a super-developed surface. Essence of the invention is that by means of the probe mechanical action on the silicon substrate, a spatial profile is formed in the shape of a region of width 7 mcm and a depth of 800 nm, then additionally on the surface of the substrate under hydrothermal synthesis method an equimolar solution of zinc acetate Zn(O₂C₂H₃)₂, hexamethyltetramine C₆H₁₂N₄ and N-cetyl-N,N,N-trimethylammonium bromide is applied. Further, heating up to 85 °C is carried out, as a result in the sphere of a spatial profile a nanolithographic drawing with a crystalline structure with a super-developed surface is formed.

EFFECT: providing the possibility of forming nanomaterials in the form of nanolithographic drawings with a crystal structure with a super-developed surface.

1 cl, 2 dwg