PRODUCTION METHOD OF HIGH-TEMPERATURE SUPERCONDUCTING FILM ON THE QUARTZ SUBSTRATE Russian patent published in 2017 - IPC H01L39/24 B82B1/00 

Abstract RU 2629136 C2

FIELD: electricity.

SUBSTANCE: production method of high-temperature superconducting film on the amorphous quartz substrate involves applying of the three-layer coating into the pre-cleaned substrate surface. The first coating layer is formed from quartz with thickness 100-400 nm by magnetron spraying, the second layer is formed from zirconium dioxide, stabilized by yttrium with thickness 100-300 nm, the third layer is made of cerium dioxide with thickness 150-350 nm.

EFFECT: provision of the possibility to eliminate the cracking of the high-temperature superconducting film.

7 cl, 3 dwg

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RU 2 629 136 C2

Authors

Porokhov Nikolaj Vladimirovich

Khrykin Dmitrij Aleksandrovich

Klenov Nikolaj Viktorovich

Maresov Aleksandr Gennadevich

Snigirev Oleg Vasilevich

Evlashin Stanislav Aleksandrovich

Dates

2017-08-24Published

2015-11-25Filed