CAPACITIVE DISPLACEMENT SENSOR Russian patent published in 2016 - IPC G01P15/08 

FIELD: measuring equipment.

SUBSTANCE: invention can be used in MEMS accelerometers and gyroscopes. Capacitive displacement sensor comprises a pulse-width modulator, a movable electrode and made on insulating plates fixed electrodes arranged symmetrically relative to movable electrodes with equal gaps, each fixed electrode is divided into two parts, and identical parts arranged on different sides of movable electrode at equal distance from axis of swinging, are interconnected by crosswise to make two differentially connected measuring capacitors, which at equal gaps have same vessel, wherein fixed electrodes located on one insulating plate, are separated by asymmetrically relative to axis of swinging and cover entire area of movable electrode and mating fixed electrodes are made symmetrically relative to plane of movable electrode.

EFFECT: high sensitivity and accuracy of displacement transducer.

1 cl, 3 dwg