FIELD: measurement equipment.
SUBSTANCE: invention relates to micromechanical devices and can be used in integrated accelerometers and gyroscopes. Technical result is achieved due to halving of stationary electrodes and crossover connection of sectors into adjacent legs of differential capacitors. As a result of electrodes' division the sensor has become insensitive to plane parallel component of movements, and there has been provided for the possibility of measuring one component, namely the angular component.
EFFECT: improved accuracy of a capacitance sensor at measuring of angular displacement.
3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| CAPACITIVE DISPLACEMENT SENSOR | 2014 |
|
RU2580637C1 |
| PROF VAVILOV'S MICROGYRO | 2012 |
|
RU2490592C1 |
| ELECTROSTATIC ACCELEROMETER | 2010 |
|
RU2423712C1 |
| MAGNETORESISTIVE SENSOR OF MOVEMENTS | 2012 |
|
RU2528116C2 |
| INTEGRATED ACCELEROMETER | 2002 |
|
RU2231796C2 |
| INTEGRAL ACCELEROMETER SENSITIVE ELEMENT | 2013 |
|
RU2526789C1 |
| MICROSYSTEM GYROSCOPE | 2011 |
|
RU2466354C1 |
| FEEDBACK AMPLIFIER FOR INTEGRAL TRANSDUCERS | 2010 |
|
RU2431849C1 |
| SENSITIVE ELEMENT OF MICROSYSTEM GYROSCOPE | 2014 |
|
RU2556334C1 |
| INERTIAL ELEMENT | 2014 |
|
RU2573616C1 |
