INTEGRAL MICRO-MECHANICAL GYROSCOPE Russian patent published in 2017 - IPC G01C19/56 

FIELD: measuring equipment.

SUBSTANCE: integral micromechanical gyroscope, made of a semiconductor material, contains a frame fixed on a dielectric base in fixed anchors through elastic bridges (4). There are comb structures of a vibratory drive on the frame. The first intermediate body (7) is fixed to elastic bridges (9) inside the frame. The first inertial body (11) is located on the elastic bridges (12) inside the first intermediate body (7) and is connected to the fixed anchors (13) through the elastic bridges (14). On the first inertial body (1) movable parts of sensor electrodes (15) are made. Their fixed parts are attached to the dielectric base. Anchors, fixed parts of the vibratory drive, fixed parts of sensor electrodes are fixed on the dielectric base. Inside the frame, the second intermediate body (8) is additionally arranged, which is connected to the frame via elastic bridges (10). The second inertial body (16) is located inside the second intermediate body (8) and is connected to it through the elastic bridges (17), and is also connected with the fixed anchors (18) through the elastic bridges (19). Under the second inertial body (16) there is a fixed planar electrode fixed to the dielectric base.

EFFECT: invention makes it possible to measure two components of the angular velocity.

1 dwg