CAPACITIVE SENSOR HAVING PERIODIC AND ABSOLUTE ELECTRODE UNIT Russian patent published in 2012 - IPC G01P3/483 

FIELD: physics.

SUBSTANCE: capacitive sensor has two sets of variable capacitor electrodes lying appropriately on a flat bearing surface, and a check weight capable of elastic displacement along a first axis which is essentially parallel to the flat bearing surface. The first set of electrodes generates high-precision periodic variation of capacitance in the range of displacement of the check weight along the axis and the second set of electrodes provides the reading of the absolute position on the periodic curve of variation of capacitance in the range of displacement along the axis.

EFFECT: high sensitivity of the sensor, enabling detection in two directions and providing a wide dynamic measurement range.

20 cl, 7 dwg