LITHOGRAPHIC SYSTEM AND METHOD OF STORING TARGET POSITION DATA Russian patent published in 2016 - IPC G03F7/20 G03B27/53 

FIELD: physics.

SUBSTANCE: lithographic system includes the feedback control system, which comprises a drive for moving a target, a measuring system for measuring the position of the target and a drive control unit. Furthermore, the lithographic system includes a measured position storage system comprising a receiving buffer and a storage unit. The control system also comprises a unidirectional connection for transmitting the measured positions to the storage system and is configured for continuous operation independent of the storage system. The maximum delay between measurement and drive control is an order less than the average delay between the reception of the measured positions in the receiving buffer and storage of the measured positions in the storage unit.

EFFECT: optimising the method of obtaining and storing position data.

27 cl, 4 dwg