INSTALLATION FOR MAGNETRON SPUTTERING OF COATINGS ON MOVING THIN METAL WIRE OR OPTICAL FIBRE Russian patent published in 2024 - IPC C23C14/35 C23C14/56 

FIELD: magnetron sputtering of coating.

SUBSTANCE: invention relates to an apparatus for magnetron sputtering of a coating on an extended flexible article in the form of a metal wire or optical fibre. Above installation includes a vacuum system, a system for rewinding a metal wire or optical fibre and a magnetron sputtering system. Said magnetron sputtering system comprises a cylindrical water-cooled cathode, anodes and a solenoid. Said anodes and cylindrical cathode are located with gaps for supply of working gas. Wire or optical fibre rewinding system comprises a feed coil installed in a vacuum chamber of said vacuum system on an axis with an asynchronous coupling, rollers, a receiving coil and a spreader, which are made with possibility of drawing metal wire or optical fibre while providing a constant difference in rotation speeds of the receiving coil and the drive of the asynchronous coupling. Spreader is a roller fixed on the manipulator and made with possibility of reciprocating movements to ensure uniform and layer-by-layer filling of the receiving coil during its rotation.

EFFECT: possibility of applying thin coatings of uniform thickness from different metals with high efficiency without overheating of metal wire or optical fibre.

1 cl, 3 dwg