COMPENSATING MICRO-OPTOELECTROMECHANICAL LINEAR ACCELERATION CONVERTER WITH MAGNETIC LEVITATING SENSITIVE ELEMENT Russian patent published in 2025 - IPC G01P15/93 

FIELD: instrumentation.

SUBSTANCE: compensating micro-optoelectromechanical linear acceleration converter with magnetic levitating sensitive element comprises a sensing module having a housing; sensitive element, which is an inertial mass, which receives forces induced by the measured acceleration, and which is an optical plate with two magnetic conductors fixed on it; two active magnetic damping assemblies, each comprising two electromagnets and one permanent magnet; four-channel optical modulator, in each channel of which there is a total internal reflection prism fixed on the housing, which receives optical power from the radiation source, equally divided between four reading channels using an optical coupler, via the input optical fibres and transmitting via the output optical fibres an output optical power containing in its values information on the position of the sensitive element and detected by the photosensitive elements; electronic control and processing unit.

EFFECT: high accuracy of measuring linear acceleration.

1 cl, 2 dwg