FIELD: electricity.
SUBSTANCE: device contains a vacuum chamber (3) and positioned therein electrode (400 … 409), which is segmented, wherein each of the electrode segments (500 … 512) has its own connecting output (6) for the source (700 … 702) of electric energy . The size of the electrode segment (500…512) selected to provide electrical energy inside the electrode segment (500…512), is not sufficient for electrical breakdown. When coating a substrate (2) is positioned on the opposite electrode (400 … 409) and include dedicated electrode segment (500 … 512) of the electrode (400 … 409) source (700 … 706) of energy. The gas, which is stimulated by the plasma chemical vapor deposition on a substrate (2), is added.
EFFECT: improving the quality of the coating.
25 cl, 12 dwg
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